Micro Systems Technology

With the advances and increasing applications of aeronautic technology and micro-electromechanical systems ( MEMS), research on rarefied gaseous flow has gained more attention than before.

随着航空航天技术以及微电子机械系统（MEMS）的发展和广泛应用，稀薄气体流动的研究越来越被重视。

Sensor technology, micro-electromechanical systems, networks and wireless communication, and other technological advances, and promote the emergence and development of wireless sensor networks.

传感器技术、微机电系统、网络和无线通信等技术的进步，推动了无线传感器网络的产生和发展。

The State-of-the-Art of Micro Electro Mechanical Systems The MEMS technology makes the device smaller and smaller.

微电子机械技术的发展和微系统加工技术的成熟，使上述的要求成为可能。

According to the development of the project, the article puts forward the technology of micro-electromechanical. systems ( MEMS) to achieve microminiaturization of this part.

基于课题的发展需要提出了用微机械电子系统（MEMS）技术来实现这一模块的微小型化。

The micro aerocraft with MEMS ( Micro Electro Mechanical Systems) technology is one of the most attractively fields of aerospace field. The micromation of power plant is the key technology of micro aerocraft.

以MEMS（Micro Electro Mechanical Systems）技术为基础的微飞行器是目前航空航天领域最具吸引力的产品之一，而动力装置的微型化问题则是性能更强更灵活的新型微飞行器的关键技术。

With the rapid development of micro-electromechanical systems and wireless communication technologies, there was an emerging technology-A large-scale wireless sensor network ( WSN) consists of a large number of inexpensive, small sensors.

随着微机电系统和无线通信技术的迅猛发展，产生了一门新兴的技术&由大量廉价、小型传感器组成的大规模无线传感器网络。

With the rapid development of micro-electromechanical systems and wireless network technology, microelectronics products have been widely used both in martial field and civil industries.

随着无线网络技术和微机电系统的飞速发展，微电子产品在民用工业和军事领域得到广泛的应用。

With the industrialization of micro system technology ( MST) and micro electro mechanical systems ( MEMS), micro processing technology becomes a new research and application hot spot in the field of machinery manufacturing.

随着微系统技术（MST）、微机电系统（MEMS）的产业化，微细加工技术成为机械制造领域新的研究与应用热点。